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Sven Tougaard, Physics Department, University of Southern Denmark, DK-5230 Odense M, Denmark.
E-mail: svt@fysik.sdu.dk, Fax: +45 6615 8760.

For reprints, send me a list with code-numbers of the papers you are interested in and your address.

The QUASES method has been applied to study thin film growth mechanisms and interdiffusion depth profiles of many systems as documented in several published papers. This includes surface nano-structures of metal/metal-, metal/silicon-, and polymer/metal- systems, surface segregation and metal-oxide growth.

Recent applications of QUASES are found under Experimental Applications.

Subjects

QUASES

Inelastic Electron Energy Loss
Effects of Elastic Electron Scattering Excitation Depth Distribution Function for AES
Semiconductors Surface Structures Determined by LEED and SPA-LEED
Semiconductors- Surface Relaxation Theory Ion Beam Induced Effects

Other Topics

  

 

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QUASES-
Quantification and Determination of Surface nano-structures by Analysis of the XPS or AES Peakshape

Theory

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16. S. Tougaard og P. Sigmund,
"Influence of Elastic and Inelastic Scattering on Energy Spectra of Electrons Emitted from Solids"
. Phys. Rev. B25, 4452 (1982).

20. S. Tougaard og A. Ignatiev,
"Concentration Depth Profiles by XPS. A New Approach". Surf. Sci. 129, 355 (1983).

24. S. Tougaard,
"Deconvolution of Loss Features from Electron Spectra", af Surf. Sci. 139, 208 (1984).

29. S. Tougaard,
"Composition Depth Information from the Inelastic Background Signal in XPS". Surf. Sci. 162, 875 (1985).

33. S. Tougaard,
"Non-destructive in-depth Composition Information from XPS". Surface Science 172, L503 (1986).

34. S. Tougaard,
"Quantitative Non-destructive in-depth Composition Information from XPS". Surf. Interf. Anal. 8, 257 (1986).

38. S. Tougaard,
"Inelastic Background Removal in XPS from Homogeneous and Inhomogeneous Solids". Journal Vacuum Science and Technology A5, 1230 (1987).

42. S. Tougaard,
"XPS Peak Shape Analysis for the Extraction of In-Depth Composition Information".Journal Vaccuum Science and Technology A5, 1275 (1987).

46. S. Tougaard,
"Quantitative Analysis of Surface Electron Spectra: Importance of Electron Transport". Surface and Interface Analysis 11, 453 (1988).

48. S. Tougaard,
"In-Depth Concentration Profile Information through Analysis of the Entire XPS Peak Shape".Applied Surface Science 32, 332 (1988).

50. S. Tougaard,
"Quantitative Analysis of Surface Electron Spectra: Importance of Electron Transport",Disputats. Odense, 1988 (Eget forlag).

52. S. Tougaard,
"Practical Algorithm for Background Subtraction". Surface Science 216, 343 (1989).

53. S. Tougaard and H.S. Hansen,
"Non-Destructive Depth Profiling through Quantitative Analysis of Surface Electron Spectra". Surface Interface Analysis 14, 730 (1989).

55. S. Tougaard,
"Inelastic Background Correction and Quantitative Surface Analysis". J. Electron Spectroscopy 52, 243 (1990).

58. S. Tougaard,
"Formalism for Quantitative Surface Analysis by Electron Spectroscopy". J. Vacuum Science and Technology A8, 2197 (1990).

59. C, Jansson and S. Tougaard,
"Influence of the Inelastic Background on the Accuracy of Factor Analysis of Electron Spectra". Surface Interface Analysis 16, 173 (1990).

73. S. Tougaard,
"Surface Electron Spectroscopy: Importance of Particle Transport". In: Interaction of Charged Particles with Solids and Surfaces (edited by A. Gras-Marti et al.) Plenum Press, New York, 487-488 (1991).

90. S. Tougaard
"Non-Destructive XPS Analysis of Surface Nano-Structures" Invited paper . Proceedings of The 2nd International Symposium on Advanced Materials (ISAM=95), Tsukuba, Japan. Ed. by. Y. Brando et al., National Institute for Research in Inorganic Materials, 1995; 22, p. 165-167.

95. S. Tougaard, "Background Subtraction for Quantitative XPS", Journal of Surface Analysis, 1 ,153-156, (1995).

97. S. Borodyanski and S. Tougaard
"Study of Electron Backscattering within the Approximation of Discrete Flows" Surface Interface Analysis, 23, 689-695 (1995)

100. S. Tougaard,
"Quantitative XPS: Non Destructive Analysis of Surface Nano-Structures" Invited paper presented at IVC-13, ICSS-9 conference, Yokohama, 1995 Applied Surface Science, 100/101, 1-10 (1996).

103. S. Tougaard,
"Surface Nano-structure Determination by XPS Peakshape Analysis" J. Vacuum Science Technol., A14, 1415-1423,(1996).

106. S. Tougaard
Universitality Classes of Inelastic Electron Scattering Cross Sections. Surface Interface Analysis, 25, 137-155 (1997)

QUASES

Quantification and Determination of Surface nano-structures by Analysis of the XPS or AES Peakshape

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Experimental Applications

19. S. Tougaard og A. Ignatiev,
"Background Intensities in XPS Spectra from Homogeneous Metals". Surf. Sci. 124, 451 (1983).

20. S. Tougaard og A. Ignatiev,
"Concentration Depth Profiles by XPS. A New Approach". Surf. Sci. 129, 355 (1983).

24. S. Tougaard,
"Deconvolution of Loss Features from Electron Spectra", af Surf. Sci. 139, 208 (1984).

25. S. Tougaard og B. Jorgensen,
"Inelastic Background Intensities in XPS Spectra". Surf. Sci. 143, 482 (1984).

27. S. Tougaard og B. Jorgensen,
"Absolute Background Determination in XPS". Surf. Interf. Anal. 7, 17 (1985).

36. S. Tougaard,
"Background Removal on XPS; Relative Importance of Intrinsic and Extrinsic Effects". Phys. Rev. B34, 6779 (1986).

41. S. Tougaard and B. Jorgensen,
"Deconvolution of Ineleastic Background Signal from XPS Spectra of Homogeneous Solids" Surface Science 182, L253 (1987).

42. S. Tougaard,
"XPS Peak Shape Analysis for the Extraction of In-Depth Composition Information". Journal Vaccuum Science and Technology A5, 1275 (1987).

46. S. Tougaard,
"Quantitative Analysis of Surface Electron Spectra: Importance of Electron Transport". Surface and Interface Analysis 11, 453 (1988).

48. S. Tougaard,
"In-Depth Concentration Profile Information through Analysis of the Entire XPS Peak Shape". Applied Surface Science 32, 332 (1988).

50. S. Tougaard,
"Quantitative Analysis of Surface Electron Spectra: Importance of Electron Transport",Disputats. Odense, 1988 (Eget forlag).

55. S. Tougaard,
"Inelastic Background Correction and Quantitative Surface Analysis". J. Electron Spectroscopy 52, 243 (1990).

56. H.S. Hansen and S. Tougaard,
"Quantitative Analysis of the Au-Ni(111) system by XPS: Separation of Peaks and Background Subtraction". Vacuum (1990). Vacuum 41, 1710 (1990).

57. S. Tougaard, W. Hetterich, A.H. Nielsen and H.S. Hansen,
"Non-Destructive Depth Information by Inelastic XPS/AES Background Analysis, Application to Cu2O Growth Investigations". Vacuum 41, 1583 (1990).

60. S. Tougaard and H.S. Hansen,
"Yb growth on Ni(100) studied by XPS Inelastic Background Analysis". Surface Science 236, 271 (1990).

62. S. Tougaard, H.S. Hansen and M. Neumann,
"Test on Validity of Recent Formalism for Quantitative XPS/AES" Surface Science 244, 125 (1991).

63. H.S. Hansen and S. Tougaard,
"Separation of spectral Components and Depth Profiling through Inelastic Background Analysis of XPS Spectra with Overlapping Peaks". Surface Interface Analysis 17, 593 (1991).

68. H.S. Hansen, S. Tougaard and H. Biebuyck,
"The Adsorption of Alkanethoils on Gold Studied Quantitatively by XPS inelastic Background Analysis". J. Electron Spectroscopy 58, 141-158 (1992).

69. S. Tougaard and C. Jansson,
"Background Correction in XPS: Comparison of Validity of Different Methods". Surface Interface Analysis 19, 171-174 (1992).

71. H.S. Hansen, A. Bensaoula, S. Tougaard, J. Zborowski and A. Ignatiev.
"The Temperature dependent variation of Bulk and Surface Composition in InxGa1-xAs on GaAs grown by Chemical Beam Epitaxy studied by RHEED, X-ray Diffraction and XPS". Journal of Crystal Growth 116, 271-282 (1992).

72. H.S. Hansen, C. Jansson and S. Tougaard,
"Inelastic Peak Shape Method Applied to Quantitative Surface Analysis of Inhomogeneous Samples". J. Vacuum Science Technology A10, 2938-2944 (1992).

74. C. Jansson and S. Tougaard,
"XPS of Ni0.44Cu0.55 Alloy". Surface Science Spectra 1, 87-90 (1992).

76. C. Jansson, H.S. Hansen, F. Yubero and S. Tougaard,
"Accuracy of the Tougaard Method for Quantitative Surface Analysis. Comparison of the Universal and REELS Inelastic Cross Sections". J. Electron Spectroscopy 60 (1992) 301-319.

77. C. Scharfschwerdt, J. Kutscher, F. Schneider, M. Neumann and S. Tougaard,
"Quantitative XPS of NiO, CoO and MnO - Effects of Elastic and Inelastic Electron Scatttering". J. Electron Spectroscopy, 60 , 321-335 (1992).

81. S. Tougaard and C. Jansson,
"Comparison of validity and consistency of methods for quantitative XPS peak analysis". Surface Interface Anal. 20, 1013-1046 (1993).

83. C. Jansson and S. Tougaard,
"Quantitative X-ray photoelectron spectroscopy of CuAu, CoNi, and CuNi alloys." J. Vac. Sci. Technol. A12, 2332-2336 (1994).

86. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Growth and In-depth distribution of thin metal films on silicon (111) studied by XPS- Inelastic Peak Shape Analysis." Surface Science. 331-333, 942-947 (1995).

87. F. Yubero, C. Jansson, D.R. Batchelor, and S. Tougaard,
"Validity of method for quantitative XPS of surface nano-structures determined by application to Cu/Au/Cu." Surface Science. 331-333, 753-758 (1995).

88. D. Fujita, M. Schleberger and S. Tougaard,
"XPS Study of the Surface Enrichment Process of Carbon on C-doped Ni(111) Using Inelastic Background Analysis. Surface Science. 331-333, 343-348 (1995).

90. S. Tougaard
"Non-Destructive XPS Analysis of Surface Nano-Structures" Invited paper . Proceedings of The 2nd International Symposium on Advanced Materials (ISAM=95), Tsukuba, Japan. Ed. by. Y. Brando et al., National Institute for Research in Inorganic Materials, 1995; 22, p. 165-167.

94. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Nano-Structure of Thin Metal Films on Silicon (111) Investigated by XPS: Inelastic Peak Shape Analysis." Journal Vacuum Science Technology, B13., 949-953 (1995).

95. S. Tougaard,
"Background Subtraction for Quantitative XPS", Journal of Surface Analysis, 1 ,153-156, (1995).

96. D. Fujita, M. Schleberger and S. Tougaard,
Estimation of Excitation Depth Distribution from Electron-excited Auger Spectra of Iron Using Peak-shape Analysis Surface and Interface Analysis, 24, 211-216 (1996)

98. A. Jablonski og S. Tougaard. “NIST Elastic-Electron-Scattering Cross-Section Database. Standard Reference Database No. 64, Version 1.0.” 1996. National Institute of Standards and Technology - Gaithersburg, Maryland 20899, USA.

99. D. Fujita, M. Schleberger and S. Tougaard,
"Extraction of Depth Distribution of Electron-excited Auger-electrons in Fe, Ni, and Si Using Inelastic Peak-shape Analysis" Surface Science, 357-358, 180-185 (1996).

100. S. Tougaard,
"Quantitative XPS: Non Destructive Analysis of Surface Nano-Structures" Invited paper presented at IVC-13, ICSS-9 conference, Yokohama, 1995 Applied Surface Science, 100/101, 1-10 (1996).

103. S. Tougaard,
"Surface Nano-structure Determination by XPS Peakshape Analysis" J. Vacuum Science Technol., A14, 1415-1423,(1996).

105. M. Schleberger, D. Fujita, and S. Tougaard
The Characteristic Depth of the Excitation Function for Auger electrons in the Noble Metals, Cu, Ag, and Au Determined by Inelastic Background Analysis.
Electron Spectroscopy and Related Phenomena.1996, In press.

111. M. Schleberger, A. C. Simonsen, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen
"Ge Growth on Si(001) studied by XPS Peak shape analysis and AFM" Journal Vacuum Science Technology, A15., 3032-3036 (1997)

112.   S. Tougaard
  Accuracy of the Non-destructive Surface Nano-structure Quantification Technique based on Analysis of the XPS or AES Peakshape. Surface Interface Analysis, 26, 249-269, 1998.

113.     A. C. Simonsen, M. Schleberger, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen
“Nano-structure of Ge deposited on Si(001): A study by XPS Peak shape analysis and AFM”, Thin Solid Films, 338, 165-171, 1998.

115.            A. Cohen Simonsen, J. P. Pøhler, C. Jeynes, S. Tougaard
"Quantification of Au deposited on Ni: XPS Peak Shape Analysis Compared to RBS"; Surface Interface Analysis, 27, 52-56, 1999.

120.     A. Cohen Simonsen, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen “Temperature Dependent Morphology of Oxidized Ge films on Si(001): XPS peak shape analysis and AFM”; Thin Solid Films, 1999 (submitted)

Quantification and Determination of Surface nano-structures by Analysis of the XPS or AES Peakshape

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Validation of the Accuracy of the QUASES-Tougaard Technique


20. S. Tougaard og A. Ignatiev,
"Concentration Depth Profiles by XPS. A New Approach". Surf. Sci. 129, 355 (1983).

51. S. Tougaard, W. Braun, E. Holub-Krappe, and H. Saalfeld,
"Tests of Algorithm for Background Correction in XPS under Variation of XPS Peak Energy". Surface and Interface Analysis 13, 225 (1988).

60. S. Tougaard and H.S. Hansen,
"Yb growth on Ni(100) studied by XPS Inelastic Background Analysis". Surface Science 236, 271 (1990).

62. S. Tougaard, H.S. Hansen and M. Neumann,
"Test on Validity of Recent Formalism for Quantitative XPS/AES" Surface Science 244, 125 (1991).

64. S. Tougaard and C. Jansson,
"Intercomparison of Algorithms for Background Subtraction in XPS Instructions for Round Robin under Community Bureau of Reference (BCR)". Brussels contract No. 5074/1/4/317/88/12-BCR-DK(10) Page 1-15 (June 1991).

65. S. Tougaard and C. Jansson,
"The Establishment of Pratical Background Subtraction Algorithms for XPS and AES". Report for Phases I and II of Community Bureau of Reference (BCR) contract No. 5074/1/4/88/12-BCR-DK(10) Page 1-135 (1991).

67. C. Jansson, H.S. Hansen, C. Jung, W. Braun and S. Tougaard,
"Validity of Background Correction Algorithms Studied by Comparison to Theory of Synchrontron Excited Core Levels and their Corresponding Auger Peak Intensities" Surface Interface Analysis 19, 217-221 (1992).

68. H.S. Hansen, S. Tougaard and H. Biebuyck,
"The Adsorption of Alkanethoils on Gold Studied Quantitatively by XPS inelastic Background Analysis". J. Electron Spectroscopy 58, 141-158 (1992).

69. S. Tougaard and C. Jansson,
"Background Correction in XPS: Comparison of Validity of Different Methods". Surface Interface Analysis 19, 171-174 (1992).

72. H.S. Hansen, C. Jansson and S. Tougaard,
"Inelastic Peak Shape Method Applied to Quantitative Surface Analysis of Inhomogeneous Samples". J. Vacuum Science Technology A10, 2938-2944 (1992).

76. C. Jansson, H.S. Hansen, F. Yubero and S. Tougaard,
"Accuracy of the Tougaard Method for Quantitative Surface Analysis. Comparison of the Universal and REELS Inelastic Cross Sections". J. Electron Spectroscopy 60 (1992) 301-319.

77. C. Scharfschwerdt, J. Kutscher, F. Schneider, M. Neumann and S. Tougaard,
"Quantitative XPS of NiO, CoO and MnO - Effects of Elastic and Inelastic Electron Scatttering". J. Electron Spectroscopy, 60 , 321-335 (1992).

78. S. Tougaard and C. Jansson ,
"Intercomparison of Algorithms for Background Correction in XPS". Results of a BCR Intercomparison Co-Sponsered by the VAMAS SCA TWP. Report for Phase III of Community Bureau of Reference (BCR) Contract No. 5070/1/4/317/88/12-BCR-DK(10), Brussels (July, 1992) Pages 1-43.

81. S. Tougaard and C. Jansson,
"Comparison of validity and consistency of methods for quantitative XPS peak analysis". Surface Interface Anal. 20, 1013-1046 (1993).

82. C. Jansson, F. Yubero, C. Scharfschwerdt, H.S. Hansen and S. Tougaard,
"The establishment of Pratical Background subtraction algorithms for XPS and AES". Report on phases IV and V of EC Community Bureau of Reference (BRC) contract No: 5074/1/4/88/12-BCR-DK(10) Page 1-183 (1993).

86. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Growth and In-depth distribution of thin metal films on silicon (111) studied by XPS- Inelastic Peak Shape Analysis." Surface Science. 331-333, 942-947 (1995).

87. F. Yubero, C. Jansson, D.R. Batchelor, and S. Tougaard,
"Validity of method for quantitative XPS of surface nano-structures determined by application to Cu/Au/Cu." Surface Science. 331-333, 753-758 (1995).

91. C. Jansson, S. Tougaard, G. Beamson, D. Briggs, S.F. Davies, A. Rossi, R. Hauert, G. Hobi, N.M.D. Brown, B.J. Meenan, C.A. Anderson, M. Repoux, C. Malitesta, and L. Sabbatini
"Intercomparison of Algorithms for Background Correction in XPS" Surface Interface Analysis, 23, 484-494 (1995)

94. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Nano-Structure of Thin Metal Films on Silicon (111) Investigated by XPS: Inelastic Peak Shape Analysis." Journal Vacuum Science Technology, B13., 949-953 (1995).

111. M. Schleberger, A. C. Simonsen, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen
"Ge Growth on Si(001) studied by XPS Peak shape analysis and AFM" Journal Vacuum Science Technology, A15., 3032-3036 (1997)

112.          S. Tougaard.
  Accuracy of the Non-destructive Surface Nano-structure Quantification Technique based on Analysis of the XPS or AES Peakshape. Surface Interface Analysis, 26, 249-269, 1998.

 115.            A. Cohen Simonsen, J. P. Pøhler, C. Jeynes, S. Tougaard
"Quantification of Au deposited on Ni: XPS Peak Shape Analysis Compared to RBS"; Surface Interface Analysis, 27, 52-56, 1999.

 

Inelastic Electron Energy Loss

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Experiment


12. S. Tougaard og A. Ignatiev,
"Electron Energy Loss Studied of the Valence Band Density of States of Scandium". Surf. Interface Anal. 3, 3 (1981).

30. S. Tougaard og Ib Chorkendorff,
"Quantitative Analysis of Reflection Electron Energy Loss Spectra of Aluminium". Solid State Commun. 57, 77 (1986).

39. I. Chorkendorff and S. Tougaard,
"Background Subtraction in Electron Spectroscopy by use of Reflection Electron Energy Loss Spectra". Applied Surface Science 29, 101 (1987).

43. S. Tougaard og I. Chorkendorff,
"Differential Inelastic-Electron Scattering Cross Sections from Experimental Reflection-Electron Energy-Loss Spectra: Application to Background Removal in Electron Spectroscopy". Phys. Rev. B35, 6570 (1987).

61. S. Tougaard and J. Kraaer,
"Inelastic Electron Scattering Cross Sections for Si, Cu, Ag, Au, Ti, Fe, and Pd". Phys. Rev. B43, 1651 (1991).

80. F. Yubero, S. Tougaard, E. Elizalde and J. M. Sanz,
"Dielectric function of Si and SiO2 from quantitative analysis of REELS spectra". Surface Interface Anal. 20, 719-726 (1993).

84. F. Yubero, J.M. Sanz, J.F. Trigo, E. Elizalde, and S. Tougaard,
"Quantitative analysis of REELS spectra of ZrO2: Detremination of dielectric loss function and inelastic mean free path." Surface and Interface Analysis 22 , 124-128 (1994).

102. F. Yubero, D. Fujita, B. Ramskov, and S. Tougaard,
"Experimental Test of Model for Angular and Energy Dependence of Reflection Electron Energy Loss Spectra". Phys. Rev.B. 53 9728-9732, (1996). 

118.   KM. Krawczyk, A. Jablonski, S. Tougaard, J. Toth, D. Varge, and G. Gergely”The inelastic Mean Free Path and the Inelastic Scattering Cross-section of Electrons in GaAs Determined from Highly Resolved Electron Energy Spectra.”
Surface Science, Vol. 402-404, p. 491-495 (1998)

119.     A. Cohen Simonsen, F. Yubero, S. Tougaard
        "Analysis of angle resolved electron energy loss in XPS spectra of Ag, Au, Co, Cu,            Fe, and Si"; Surface Science 1999, In press

 

Inelastic Electron Energy Loss

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Theory

30. S. Tougaard og Ib Chorkendorff,
"Quantitative Analysis of Reflection Electron Energy Loss Spectra of Aluminium". Solid State Commun. 57, 77 (1986).

37. S. Tougaard,
"Low Energy Inelastic Electron Scattering Properties of Noble and Transition Metals". Solid State Commun. 61, 547 (1987).

43. S. Tougaard og I. Chorkendorff,
"Differential Inelastic-Electron Scattering Cross Sections from Experimental Reflection-Electron Energy-Loss Spectra: Application to Background Removal in Electron Spectroscopy". Phys. Rev. B35, 6570 (1987).

45. S. Tougaard,
"Differential Inelastic Scattering Cross Sections for Low Energy (100eV-few keV) Electrons in Solids". "Radiation Research" Vol. 2, eds. E.M. Fielden, J.F. Fowler, J.H. Hendry, and D. Scott (Taylor and Francis, London 1987) p. 266.

70. F. Yubero and S. Tougaard,
"Quantitative Analysis of Reflection Electron Energy Loss Spectra". Surface Interface Analysis 19, 269-273 (1992).

75. F. Yubero and S. Tougaard,
"Model for Quantitative Analysis of Reflection Electron Energy Loss Spectra (REELS)". Phys. Rev. B46, 2486-2497 (1992).

101. F. Yubero, J.M. Sanz, B. Ramskov, and S. Tougaard,
"Model for Quantitative Analysis of Reflection Electron Energy Loss Spectra: Angular Dependence". Phys. Rev.B.53 9719-9727, (1996).

106. S. Tougaard
Universitality Classes of Inelastic Electron Scattering Cross Sections. Surface Interface Analysis, 25, 137-155 (1997)
4

109.     A. Cohen Simonsen, F. Yubero, and S. Tougaard
       "Quantitative Model for Electron Energy Loss in XPS."
        Phys. Rev. B 56, 1612, 1997.

Effects of Elastic Electron Scattering

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49. A. Jablonski, J. Gryko, J. Kraaer and S. Tougaard,
"Elastic Electron Backscattering from Surfaces". Phys. Rev. B39, 61 (1989).

54. A. Jablonski and S. Tougaard,
"Comparison of the Attenuation Lengths and the Inelastic Mean Free Path for Photoelectorns in Silver". J. Vacuum Science and Technology A8, 106 (1990).

66. A. Jablonski, H.S. Hansen, C. Jansson and S. Tougaard,
"Elastic electron Backscattering from Surfaces with Overlayers". Phys. Rev. B45 3694-3702 (1992).

77. C. Scharfschwerdt, J. Kutscher, F. Schneider, M. Neumann and
S. Tougaard, "Quantitative XPS of NiO, CoO and MnO - Effects of Elastic and Inelastic Electron Scatttering". J. Electron Spectroscopy, 60 , 321-335 (1992).

79. A. Jablonski, C. Jansson and S. Tougaard,
"Elastic electron backscattering from surfaces: Prediction of maximum intensity".Phys. Rev. B. 47, 7420-7430 (1993).

85. A. Jablonski and S. Tougaard,
"Database of relativistic elastic scattering cross sections." Surface and Interface Analysis 22, 129-133 (1994).

92. S. Tougaard and A. Jablonski
"Test of Elastic Electron Scattering Corrections for Quantitative XPS".Surface Interface Analysis, 23, 559-564 (1995)

93. I.S. Tilinin, A. Jablonski, and S. Tougaard
"Pathlength Distribution of Photoelectrons from Homogeneous Noncrystalline Solids. Consequences for Inelastic Background Analysis." Physical Review B52, 5935, (1995).

104. I. S. Tilinin, A. Jablonski, and S. Tougaard
Emission-depth Dependence of the Signal Photoelectron Energy Spectrum. Surface Interface Analysis, 25, 119-131 (1997)

107. S. Tougaard and A. Jablonski
Quantitative XPS; Influence of Elastic Electron Scattering.Surface Interface Analysis, 25,404-408 (1997)

110.     A. Jablonski and S. Tougaard,
" Practical Correction Formula for Elastic Electron Scattering Effects in Attenuation of             Auger- and Photo- Electrons."Surface Interface Analysis, 26, 17 – 29 (1998)

114.     A. Jablonski and S. Tougaard
" Evaluation of Validity of the Depth-dependent Correction Formula (CF) for Elastic Electron Scattering Effects in AES and XPS.";   Surface Interface Analysis, 26, 374 – 385, 1998.

116.     A. Jablonski and S. Tougaard           
" Escape Probability of Electrons from Solids. Influence of Elastic Electron Scattering."
  Surface Science. Submitted 1998.

117.     C. J. Powell, J. R. Rumble, D. M. Blakeslee, M. E. Dal-Favero, A. Jablonski, and S. Tougaard
“The NIST Surface Analysis Center” p. 887- 891 in “Characterization and Metrology for ULSI Technology”, D. G. Seiler et al (Eds.),      The American Institute of Physics, 1998

121.     A. Dubus, A. Jablonski, and S. Tougaard           
“Evaluation of Theoretical Models for Elastic Electron Backscattering from Surfaces”Progress in Surface Science, 1999 (submitted)

 

Excitation Depth Distribution Function for AES



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96. D. Fujita, M. Schleberger and S. Tougaard,
Estimation of Excitation Depth Distribution from Electron-excited Auger Spectra of Iron Using Peak-shape Analysis Surface and Interface Analysis, 24, 211-216 (1996)

99. D. Fujita, M. Schleberger and S. Tougaard,
"Extraction of Depth Distribution of Electron-excited Auger-electrons in Fe, Ni, and Si Using Inelastic Peak-shape Analysis" Surface Science, 357-358, 180-185 (1996).

105. M. Schleberger, D. Fujita, and S. Tougaard
The Characteristic Depth of the Excitation Function for Auger electrons in the Noble Metals, Cu, Ag, and Au Determined by Inelastic Background Analysis.
Electron Spectroscopy and Related Phenomena. 82, 173-178 (1996)

108. A. Jablonski and S. Tougaard
The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact Surface Interface Analysis, 25, 688-698 (1997)

Ion Beam Induced Effects

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15. P. Sigmund og S. Tougaard,
"Electron Emission from Solids during Ion Bombardment. Theoretical Aspects".I "Inelastic Particle-Surface Collisions", Chemical Physical Series Vol. 17, eds. E. Taglauer and W. Heiland (Springer, Berlin 1981) p.2.

18. A. Zomorrodian, S. Tougaard og A. Ignatiev,
"Range Distributions of Low Energy Ions on Silver and Copper". IEEE Trans. on Nucl. Sci. NS-30. 1066 (1983).

21. A. Zomorrodian , S. Tougaard og A. Ignatiev,
"Ion-Beam-Enhanced Diffusion at Surfaces". J. Vac. Sci. Technol. A1, 339 (1983).

22. A. Zomorrodian , S. Tougaard og A. Ignatiev,
"Depth Profile of Implanted Low Energy Ions in Metals". Physica Scripta T6, 76 (1983).

23. K. Snowdon, J. Onsgaard og S. Tougaard,
"Observation of a Surface Peak in Low Energy Implant Depth Porfiles in Silicon". Nucl. Instr. and Methods B2, 797 (1984).

26. S. Tougaard, A. R. Zomorrodian, L. Kornblit og A. Ignatiev,
"Defect Induced Segregation of Nitrogen Implanted in Cu". Surf. Sci. 152, 932 (1985).

28. A. Zomorrodian, S. Tougaard og A. Ignatiev,
"Range Distribution of Low-Energy Nitrogen Ions in Metals". Phys. Rev. B 30, 3124 (1984).

31. L. Kornblit, A. R. Zomorrodian, S. Tougaard og A. Ignatiev,
"Low Temperature Radiation Induced Surface Segregation". Radiat. Effects 91, 97 (1985).

Semiconductors Surface Relaxation Theory


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3. S. Tougaard,
"Surface Relaxation of Zinc Blende (110)". Phys. Rev. B18, 3799 (1978).

6. S. Tougaard,
"Investigation on Surface Properties of Compound Semiconductors". Licentiatafhandling, Odense Universitet, januar 1979.

Semiconductors

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1. P. Morgen, J.H. Onsgaard og S. Tougaard,
"Conductivity of Powered ZnO with Chemisorbed Oxygen During Photodesorption", J. Appl. Phys. 47, 5094 (1976).

2. P. Morgen, J.H. Onsgaard og S. Tougaard,
"Desorption from Powered ZnO During Electron Bombardment and Interaction with Atomic Hydrogen". J. Appl. Phys. 48, 3443 (1977).

3. S. Tougaard, "Surface Relaxation of Zinc Blende (110)". Phys. Rev. B18, 3799 (1978).
5. P. Morgen, J. H. Onsgaard og S. Tougaard,
"Observation of Changes in the Electronic Density of States at a Si(111) Surface During Adsorption of Oxygen by Auger Electron Spectroscopy". Appl. Phys. Lett. 8, 34 (1979).

6. S. Tougaard,
"Investigation on Surface Properties of Compound Semiconductors". Licentiatafhandling, Odense Universitet, januar 1979.

13. S. Tougaard, P. Morgen og J. Onsgaard,
"Mechanisms for Oxygen Adsorption on the Si(110) Surface Studied by Auger Electron Spectroscopy". Surf. Sci. 111, 545 (1981).

23. K. Snowdon, J. Onsgaard og S. Tougaard,
"Observation of a Surface Peak in Low Energy Implant Depth Porfiles in Silicon". Nucl. Instr. and Methods B2, 797 (1984).

71. H.S. Hansen, A. Bensaoula, S. Tougaard, J. Zborowski and A. Ignatiev.
"The Temperature dependent variation of Bulk and Surface Composition in InxGa1-xAs on GaAs grown by Chemical Beam Epitaxy studied by RHEED, X-ray Diffraction and XPS". Journal of Crystal Growth 116, 271-282 (1992).

72. H.S. Hansen, C. Jansson and S. Tougaard,
"Inelastic Peak Shape Method Applied to Quantitative Surface Analysis of Inhomogeneous Samples". J. Vacuum Science Technology A10, 2938-2944 (1992).

86. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Growth and In-depth distribution of thin metal films on silicon (111) studied by XPS- Inelastic Peak Shape Analysis." Surface Science. 331-333, 942-947 (1995).

94. M. Schleberger, D. Fujita, C. Scharfschwerdt and S. Tougaard,
"Nano-Structure of Thin Metal Films on Silicon (111) Investigated by XPS: Inelastic Peak Shape Analysis." Journal Vacuum Science Technology, B13., 949-953 (1995).

111. M. Schleberger, A. C. Simonsen, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen
"Ge Growth on Si(001) studied by XPS Peak shape analysis and AFM" Journal Vacuum Science Technology, A15., 3032-3036 (1997)

113.     A. C. Simonsen, M. Schleberger, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen
“Nano-structure of Ge deposited on Si(001): A study by XPS Peak shape analysis and AFM”, Thin Solid Films, 338, 165-171, 1998.

120.     A. Cohen Simonsen, S. Tougaard, J. L. Hansen, and A. Nylandsted Larsen “Temperature Dependent Morphology of Oxidized Ge films on Si(001): XPS peak shape analysis and AFM”; Thin Solid Films, 1999 (submitted)

Surface Structures Determined by LEED and SPA-LEED

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10. S. Tougaard, A. Ignatiev og D. L. Adams,
"Surface Structure of Scandium". Le Vide, les Couches Minces. Vol. 201 p. 677 (1980).

17. S. Tougaard og A. Ignatiev,
"Atomic Structure of the Scandium (0001) Surface". Surf. Sci. 115. 270 (1982).

32. S. Tougaard, H. Saalfeld, W. Bolwin og M. Neumann,
"Multilayer Model for Analysis of Surface Imperfections by LEED".Surface Science 169, L266 (1986).

35. H. Saalfeld, S. Tougaard, K. Bolwin og M. Neumann,
"Evidence for Mono- and Diatomic Steps on a Cleaved Os (0001) Surface". Surface Science 178, 452 (1986).

Other Topics

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4. J. H. Onsgaard, S. Tougaard og P. Morgen,
"Segregation of Impurities at the Surface of a Scandium Single Crystal". Appl. Surf. Sci. 3, 113 (1979).

7. J. Onsgaard, S. Tougaard, P. Morgen og F. Ryborg,
"Scandium Surfaces Studied by Auger Electron Spectroscopy". Proc. Surf. Anal. Conf. Karlovy Vary, Czechoslovakia, 1979, p.3.1.

8. J. Onsgaard, S. Tougaard, P. Morgen og F. Ryberg,
"Scandium and Lutetium Surfaces Studied by Reflection Electron Spectroscopy". J. Electron Spectrosc. Relat. Phenom. 18, 29 (1980).

9. Harold F. Winters, P. Morgen, S. Tougaard og J. Onsgaard,
"The Adsorption of N2 on W(100) under Long Exposure". Le Vide, les Couches Minces. Vol. 201 p. 303 (1980).

11. J. Onsgaard, S. Tougaard, P. Morgen og F. Ryberg,
"Scandium, Yttrium and Lutetium Surfaces Studied by Electron Spectroscopy". Le Vide, les Couches Minces. Vol. 201 p. 1361 (1980).

14. I. Jacobsen, G.T. Nielsen, J. Onsgaard og S. Tougaard,
"Performance and Testing of Gear Oils and Transmission Fluids". Proc. Inst. Petrol. 1, 23 (1981).

44. K. Bolwin, S. Witzel, M. Neumann, I. Chorkendorff and S. Tougaard,
"Bremstraglung Induced Auger Electron Spectra (BAES) of the 5d-transition Metals Ta-Au" Fresenius Z. Anal. Chem. 329, 152 (1987).

47. A. Kischkoweit, H. Koschmieder, K.J. Snowdon, S. Tougaard,
and W. Heiland,"Secondary Ion Mass Spectroscopy (SIMS) Study of LiNbO3". Fresenius Z. Anal. Chem. 329, 240 (1987).

89. A. Jablonski, B. Lesiak, L. Zommer, M.F. Ebel, H. Ebel,
Y. Fukuda, Y. Suzuki,and S. Tougaard, "Quantitative Analysis by XPS using the Multiline Approach" Surface Interface Analysis 21, 724-730 (1994)